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We present an innovative micro gyroscope that is capable of detecting three-dimensional (3-D) angular motions. The motion of each sensing element is, by mechanical design, restricted to move in a direction orthogonal to each other such that measurements by high-resolution capacitors with signal...
This Special Section Guest Editorial provides an overview of the topical area and an introduction to the articles featured in the special section.
As smaller feature sizes and hyper-numerical apertures (>1.0) are approached, rigorous electromagnetic field (EMF) simulation of light diffraction from the mask predicts a more pronounced impact of the mask topography, the optical properties of the mask materials, and the polarization of the...
In the dip pen nanolithography (DPN) process, ultra-sharp scanning probe tips (“pens”) are coated with chemical compounds (or “ink”) and contacted with a surface to produce submicron-sized features. This work describes the design, fabrication, and testing of a microfluidic ink delivery...
Cycloalkanes are candidates for immersion fluids because of their potential for low absorption in the 193- nm region and for a high refractive index (RI). We have developed an empirical correlation between refractive index and density of alkanes, which allows a prediction of the best candidates...
Optical proximity correction (OPC) is one of the most widely used resolution enhancement techniques (RET) in nanometer designs to improve subwavelength printability. Conventional model-based OPC assumes nominal process conditions without considering process variations because of the lack of...
The interdisciplinary nature of optical microelectromechanical systems (MEMS) makes its design a highly involved process. To design a device that will meet the required specifications over its entire lifetime, reliability issues must be included in the design process. This work develops a method...
We describe design house approaches for design rule developments with emphasis of valuations of pre-optical proximity correction (pre-OPC) layouts and their simulation results. To begin, we describe the procedure of the simulation model calibration. An evaluation of metrics for analyzing the...
We present the details of our study on the internal stresses and adhesion strengths of SU-8 structures to different substrate seed layers. The effect of adhesion promoter—methacryloxy propl trimethoxysilane (MPTS), and OmniCoat—and different seed layer combinations ( Ti / Cu / Ti , Ti / Cu ,...
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