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This paper presents a new functional material for smart structure applications. Piezoelectric PZT/cement 1-3 composites that have good compatibility with civil engineering structural materials have been studied. The composites with different volume fractions of PZT ranging from 0.25 to 0.77 were...
FePt films were deposited on Cr 1-x Mo x underlayers by dc magnetron sputtering. The effects of the Mo content in the underlayers, underlayer thickness, substrate temperature, and FePt film thickness on the structural and magnetic properties of the FePt films were studied. Experimental results...
A mechanism of debris accumulation around the hole created on a silicon substrate with a femtosecond laser is experimentally studied. The hole created by the laser pulses has an edge consisting of pillared structures. However, no solid or liquid materials with similar dimensions as the pillared...
We summarize our key developments in nanoimprint lithography (NIL) that employs a single layer resist lift-off process: lowering of the imprint temperature (for thermal imprint) and pressure, achieving uniform resist thickness and low residual resist layer thickness in the trenches, and...
In the equilibrium immiscible Ag–Co system characterized by a large positive heat of formation (28 kJ/mol), interesting structural phase transitions were observed in Ag–Co multilayered films upon 200-keV xenon-ion irradiation at 300 K within a dose range of 5×10 14 to 9×10 15 Xe + /cm 2 ....
The technique of copper filling of trenches which is based on the effect of the melting temperature decrease, depending on film thickness reduction, has been proved and demonstrated experimentally. An approach to diffusion barrier creation is proposed. Ta-W-N amorphous alloy has been selected as...
Electrical and optical properties were investigated in porous thin films consisting of In 2 O 3 :Sn (indium tin oxide; ITO) nanoparticles. The temperature-dependent resistivity was successfully described by a fluctuation-induced tunneling model, indicating a sample morphology dominated by...
The thermal stability and dielectric properties of amorphous CaZrO x film prepared by pulsed laser deposition (PLD) have been investigated. X-ray diffraction (XRD) investigation shows that CaZrO x film still remains amorphous after rapid thermal annealing at 700 °C for 10 min. Differential...
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