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. Its fabrication is based on techniques used in microsystem processing and in particular anisotropic etching, thin film deposition, electroplating, and anodic bonding. The mass spectrometer consists of a plasma electron source for measurand ionisation as well as an ion optic and a mass separator...
matrix by ion-beam mixing of SiO 2 /Ag multilayers is studied via Rutherford backscattering spectrometry, optical absorption, and transmission electron microscopy experiments. In a first step, irradiation with MeV heavy ions transforms the continuous Ag layers into a string of micrometer-sized Ag...