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J OUR NAL OF M AT E R I A L S S CI E N CE L ETTER S 20, 2001, 2005 – 2008 Subsolidus phase equilibria in the RuO –TiO –ZrO system 2 2 2 M. HROVAT, A. BEN CAN, J. HOLC, M. KOSEC Jozef ˇ Stefan Institute, Jamova 39, 1000 Ljubljana, Slovenia E-mail: marko.hrovat@ijs.si Ferroelectric ceramic materials based on solid solu- Phase equilibria in the RuO − TiO and RuO − 2 2 2 tions of Pb(Zr,Ti)O (PZT) are used in the electronics ZrO systems have been studied by Hrovat et al. 3 2 industry for sensors and actuators and for electrome- [11, 12]. Both RuO − TiO and RuO − ZrO systems 2 2 2 2 chanical transducers, to name just a few examples. A are “empty”; there is no binary compound and no liquid significant part of the research in this field is aimed phase (eutectic) at temperatures up to 1405 C, the tem- at the development and characterization of PZT thin perature at which RuO decomposes (in air) to metallic films. This thin film may be deposited on substrates ruthenium and oxygen. The solid solubility at 1200 C by various techniques, for example
Journal of Materials Science Letters – Springer Journals
Published: Oct 1, 2004
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