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Amperometric/potentiometric hydrocarbon sensors: real world solutions for use in ultra high vacuum

Amperometric/potentiometric hydrocarbon sensors: real world solutions for use in ultra high vacuum Carbonaceous deposits produced on Ru-capped multilayer mirrors under extreme ultra violet irradiation in the presence of adventitious gaseous hydrocarbons are a major obstacle to process implementation of EUV lithography. Here, by means of synchrotron radiation and laboratory measurements we show how carbon contamination occurs as a result of photoelectron-induced surface chemistry. We also demonstrate how a device based on an oxygen ion conducting solid electrolyte can act as a sensitive and reproducible sensor for detection of trace amounts of hydrocarbons in high vacuum environments. http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png Journal of Applied Electrochemistry Springer Journals

Amperometric/potentiometric hydrocarbon sensors: real world solutions for use in ultra high vacuum

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References (23)

Publisher
Springer Journals
Copyright
Copyright © 2008 by Springer Science+Business Media B.V.
Subject
Chemistry; Industrial Chemistry/Chemical Engineering; Physical Chemistry ; Electrochemistry
ISSN
0021-891X
eISSN
1572-8838
DOI
10.1007/s10800-008-9568-5
Publisher site
See Article on Publisher Site

Abstract

Carbonaceous deposits produced on Ru-capped multilayer mirrors under extreme ultra violet irradiation in the presence of adventitious gaseous hydrocarbons are a major obstacle to process implementation of EUV lithography. Here, by means of synchrotron radiation and laboratory measurements we show how carbon contamination occurs as a result of photoelectron-induced surface chemistry. We also demonstrate how a device based on an oxygen ion conducting solid electrolyte can act as a sensitive and reproducible sensor for detection of trace amounts of hydrocarbons in high vacuum environments.

Journal

Journal of Applied ElectrochemistrySpringer Journals

Published: Apr 29, 2008

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