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Evaluation of a vertical piezoelectric transducer stage using a large range metrological atomic force microscope

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Title
Evaluation of a vertical piezoelectric transducer stage using a large range metrological atomic force microscope
Author(s)
Wang, Shihua; Tan, Siew Leng; Xu, Gan
Journal
Journal of Micro/Nanolithography, MEMS and MOEMS , Volume 11 (1) SPIE – Jan 1, 2012
Publisher
SPIE
Copyright
Copyright © 2012 Society of Photo-Optical Instrumentation Engineers
ISSN
1932-5150
eISSN
1932-5134
D.O.I.
10.1117/1.JMM.11.1.011005
Publisher site
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