Sign Up
Help
Log in

Login failed. Please try again.

Forgot your password?

Log in with Facebook

Advanced Filters:
Title contains these words:
Author: Last name, First name
Date:
to

Specific Data Sources:

All Edit
- Acta Geoturistica
- Addleton Academic Publishers
- Allen Press
- Am. Soc for Pharma & Experimental Therapeutics
- American Academy of Orthopaedic Surgeons
- American Association for Clinical Chemistry
- American Association of Cancer Research
- American Association of Physicists in Medicine
- American Association of Physics Teachers
- American Economic Association
- American Folklore Society
- American Institute of Physics
- American Journal of Neuroradiology
- American Meteorological Society
- American Physical Society (APS)
- American Psychiatric Publishing, Inc (Book)
- American Psychiatric Publishing, Inc (Journal)
- American Public Health Association
- American Society for Investigative Pathology
- American Society For Microbiology
- American Society for Nutrition
- American Society of Plant Biologist
- American Vacuum Society
- Anales Galdosianos
- Annual Reviews
- arXiv (Cornell University)
- Ashland University
- Association for Computing Machinery
- Australian & New Zealand Association of Medieval & Early Modern Studies, Inc. (ANAZAMEMS, Inc.)
- Autobiography Society, Inc.
- Berghahn Books
- Bibliographical Society of the University of Virginia
- Bulletin of the Comediantes
- Center for Irish Studies at the University of St. Thomas
- Centre for Agricultural Bioscience International
- Clinical Trials
- DailyMed
- de Gruyter
- Department of Classics @ the University of Iowa
- Dictionary Society of North America
- Duke University Press
- Ecological Society of America
- eContent Management
- Edinburgh University Press
- Elsevier
- Emerald Publishing
- European Journal of Tourism Research
- European Medicines Agency
- European Patent Office Abstracts
- Fed of American Socs for Experimental Biology
- Fordham University Press
- Friends Historical Association
- Genetics Society of America
- Guilford Press
- Health Affairs
- Hindawi Publishing Corporation
- Hume Society
- i-manager Publications
- iMedPub, Internet Medical Publishing
- Informa Healthcare
- INFORMS
- Institut national d'études démographiques
- Institute of Electrical and Electronics Engineers
- Institute of Physics
- Institute of Southeast Asian Studies
- International Association of Science and Technology for Development
- International Union of Crystallography
- IOS Press
- James Joyce Research Center @ University College Dublin
- JB&JS
- La corónica: Journal of Medieval Hispanic Languages, Literatures & Culture
- Left Coast Press
- Linguistic Society of America
- Liverpool University Press
- Logos: Journal of Catholic Thought & Culture
- M.E. Sharpe
- Mary Ann Liebert
- MEDLINE Abstracts
- MIT Press
- National Association of Professors of Hebrew
- Nature Publishing Group (NPG)
- Oxford University Press
- Oxford University Press
- Penn State University Press
- Pier Professional
- PNAS
- Portland Press
- PsycARTICLES®
- PsycBOOKS®
- PsycCRITIQUES®
- Public Library of Science (PLoS) Journal
- PubMed Central
- Purdue University Press
- Radiological Society of North America, Inc.
- Rockefeller University Press
- Rocky Mountain Modern Language Association
- Royal College of Nursing (RCN)
- Royal Irish Academy
- Royal Society of Chemistry
- SAGE
- Scrivener Publishing
- Society for Japanese Studies
- Society for the Advancement of Scandinavian Study
- Sociological Demography Press
- Southeast Asia Program [Cornell University]
- Southwest Center (Univ of Arizona)
- SPIE
- Springer Journals
- Springer Protocols
- State University of New York Press
- Taylor & Francis
- Texas State Historical Association
- The American Physiological Society
- The Canadian Committee on Labour History
- The Scientist
- The Scriblerian and the Kit-Cats
- The Western Literature Association
- University of California Press
- University of Chicago Press
- University of Hawai'I Press
- University of Illinois Press
- University of Missouri
- University of Nebraska Press
- University of North Carolina Press
- University of Pennsylvania Press
- University of Tennessee
- University of Winnipeg
- University of Wisconsin Press
- US Patent Office Abstracts
- West Virginia University Press
- Wiley
- World IP Organization PCT Abstracts
- World Scientific Publishing Company
Select All | Select None

Journal Article Info:
- Journal Name:
- Publisher:
- ISSN:

Browse

DeepDyve - Search, Rent, Read
The easiest way for you to get scholarly articles:

Millions of articles from over 6,000 authoritative journals.
Get any 40 rentable articles for just $40 a month.
Read rented articles for an entire year.
Unused rentals get rolled over.

Sign Up for a Free Account »

Candidate plasma-facing materials for extreme ultraviolet lithography source components

Hassanein, A.; Rice, B.

Follow Journal of Micro/Nanolithography, MEMS and MOEMS , Volume 3 (4) SPIE – Oct 1, 2004

Rent for Free

Download PDF

8 pages

Loading next page...

End of preview. The entire article is 8 pages. Rent for Free

/lp/spie/candidate-plasma-facing-materials-for-extreme-ultraviolet-lithography-gmETCSYyPr

More Like This
Article Details

Loading...

Title: Candidate plasma-facing materials for extreme ultraviolet lithography source components
Author(s): Hassanein, A.; Rice, B.
Journal: Follow Journal of Micro/Nanolithography, MEMS and MOEMS , Volume 3 (4) SPIE – Oct 1, 2004
Publisher: SPIE
Copyright: Copyright © 2004 Society of Photo-Optical Instrumentation Engineers
ISSN: 1932-5150
eISSN: 1932-5134
D.O.I.: 10.1117/1.1793153
Publisher site: Get PDF

Browse: Subject Areas | Journals | Publishers

Welcome to DeepDyve

Simple. Affordable. Research.

DeepDyve — the simplest way to get the articles you need.

Follow @DeepDyve

About
Facebook Twitter
Partners
Publishers Businesses
Support
FAQ Contact Us

© 2013 DeepDyve, Inc. All rights reserved. Terms of Service | Privacy Policy

Bookmark an Article

To bookmark an article, please log in first, or sign up for a DeepDyve account if you don't already have one.

Subscribe to Journal Email Alerts

To subscribe to email alerts, please log in first, or sign up for a DeepDyve account if you don't already have one.

Create Your Free DeepDyve Account

Preview full articles for free – Rent and share from 7,000+ top scholarly journals.

System error. Please try again!

or

Sign up with Facebook

Professional Researcher?

Get unlimited access to all of our articles by upgrading to a Professional Plan for $40/month. It takes just 60 seconds.

Learn about Pro Plans

Already have an account? Log in

Thank you for renting with DeepDyve

Your PayPal account has been charged $3.99. You now have access to the full text of this article. A rental receipt has also been sent to your email address.

Your credit card has been charged $3.99. You now have access to the full text of this article. A rental receipt has also been sent to your email address.

New! You can now keep track of new articles from Journal of Micro/Nanolithography, MEMS and MOEMS on your personalized homepage! Learn more

OK

References

PDF Not Available for this Article

We've noted your interest in this PDF and will work with our publisher partner to discuss enabling downloads for this journal.

In the meantime, you can read the full article by renting it.

Rent this Article or visit the publisher site to buy the PDF.

Thank you for purchasing with DeepDyve

Your PayPal account has been charged $.

Your credit card has been charged $.

You can now download this article. A receipt has also been sent to your email.

Download this Article or I'm done with my download

Thank you for purchasing with DeepDyve

Your PayPal account has been charged .

Your credit card has been charged .

You will receive an email confirming your purchase and a second email with instructions on downloading the PDF.

Order status:

Ok

Download Article

To download this article, please log in first, or sign up for a DeepDyve account if you don't already have one.

Sign up Log in

Article Printing

To print this article, please log in first, or sign up for a DeepDyve account if you don't already have one.

Sign up Log in

Thank you for printing with DeepDyve

Your PayPal account has been charged $0.

Your credit card has been charged $0.

You can now print this article. A purchase receipt has also been sent to your email address.

Print the Selected Pages or I'm done with my printing

Rent this Article

5 Minutes

Free - Full Article!

Great for scanning articles.
5-minute rentals are available once a day per article.

30 Days

Use a Rental Token

Take your time and study more in depth.
Read 30-day rentals as often as you want.

Read rented articles online, anywhere in your browser.
Copying, printing, and downloading aren't included with rentals.

Need to Keep Reading?

Are you a Professional Researcher?

Get unlimited access to all of our articles by upgrading to a Professional Plan.

This is the best solution for keeping on top of your field. It takes just 60 seconds.

Get Unlimited Access
Professional Plan - $40/month

If a monthly subscription doesn't work for you, here are more options:

Rent for 30-days
$20 - 5 Articles Loading...

Please refresh to generate a new download link

Your article download link has expired. Please refresh this page to obtain a new download link and try again.

Create Your Free DeepDyve Account

Preview full articles for free – Rent and share from 3,000+ top scholarly journals.

System error. Please try again!

or

Sign up with Facebook

Professional Researcher?

Get unlimited access to all of our articles by upgrading to a Professional Plan for $40/month. It takes just 60 seconds.

Learn about Pro Plans

Already have an account? Log in

Follow a Journal

To get new article updates from a journal on your personalized homepage, please log in first, or sign up for a DeepDyve account if you don't already have one.