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Multilayer, Stacked Spiral Copper Inductors on Silicon with Micro-Henry Inductance Using Single-Level Lithography

Follow Active and Passive Electronic Components , Volume 2012 (2012) Hindawi Publishing Corporation – Apr 3, 2012

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Title: Multilayer, Stacked Spiral Copper Inductors on Silicon with Micro-Henry Inductance Using Single-Level Lithography
Journal: Follow Active and Passive Electronic Components , Volume 2012 (2012) Hindawi Publishing Corporation – Apr 3, 2012
Publisher: Hindawi Publishing Corporation
Copyright: Copyright © 2012 Timothy Reissman et al.
ISSN: 0882-7516
eISSN: 1563-5031
Publisher site: Get PDF

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