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Selective interhalogen etching of tantalum compounds and other semiconductor materials
Ibbotson, D. E.; Mucha, J. A.; Flamm, D. L.; Cook, J. M.
Follow Applied Physics Letters , Volume 46 (8) American Institute of Physics – Apr 15, 1985
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- Title
- Selective interhalogen etching of tantalum compounds and other semiconductor materials
- Author(s)
- Ibbotson, D. E.; Mucha, J. A.; Flamm, D. L.; Cook, J. M.
- Journal
- Follow Applied Physics Letters , Volume 46 (8) American Institute of Physics – Apr 15, 1985
- Publisher
- American Institute of Physics
- Copyright
- Copyright © 1985 American Institute of Physics
- ISSN
- 0003-6951
- eISSN
- 0003-6951
- D.O.I.
- 10.1063/1.95886
- Publisher site
- Get PDF