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A method and first results utilizing a network analyzer as a loaded cavity probe to study the resonance properties of a plasma filled electron cyclotron resonance ion source (ECRIS) plasma chamber are presented. The loaded cavity measurements have been performed using a dual port technique, in which two separate waveguides were used simultaneously. One port was used to ignite and sustain the plasma with a microwave source operating around 11 GHz and the other was used to probe the cavity properties with the network analyzer using a frequency range around 14 GHz. The first results obtained with the JYFL 14 GHz ECRIS demonstrate that the presence of plasma has significant effects on the resonance properties of the cavity. With plasma the frequency dependent behavior is strongly damped and this trend strengthens with increasing microwave power.

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Electron cyclotron resonance ion source plasma chamber studies using a network analyzer as a loaded cavity probe

Toivanen, V.; Tarvainen, O.; Lyneis, C.; Kauppinen, J.; Komppula, J.; Koivisto, H.
Review of Scientific Instruments , Volume 83 (2)
American Institute of PhysicsFeb 1, 2012

More Info

  • Publisher American Institute of Physics
  • Copyright Copyright © 2012 American Institute of Physics
  • ISSN 0034-6748
  • eISSN 1089-7623
  • D.O.I. 10.1063/1.3660818
  • Publisher site Get PDF  

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