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Electrical characteristics of a stacked nitride/microcrystalline‐silicon/oxide/silicon structure

Wu, Shye Lin; Lee, Chung Len; Lei, Tan Fu
Applied Physics Letters , Volume 63 (1) American Institute of PhysicsJul 5, 1993
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Title
Electrical characteristics of a stacked nitride/microcrystalline‐silicon/oxide/silicon structure
Author(s)
Wu, Shye Lin; Lee, Chung Len; Lei, Tan Fu
Journal
Applied Physics Letters , Volume 63 (1) American Institute of Physics – Jul 5, 1993
Publisher
American Institute of Physics
Copyright
Copyright © 1993 American Institute of Physics
ISSN
0003-6951
eISSN
0003-6951
D.O.I.
10.1063/1.109738
Publisher site
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