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Dielectric properties of electron‐beam deposited Ga 2 O 3 films

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Title
Dielectric properties of electron‐beam deposited Ga 2 O 3 films
Author(s)
Passlack, M.; Hunt, N. E. J.; Schubert, E. F.; Zydzik, G. J.; Hong, M.; Mannaerts, J. P.; Opila, R. L.; Fischer, R. J.
Journal
Applied Physics Letters , Volume 64 (20) American Institute of Physics – May 16, 1994
Publisher
American Institute of Physics
Copyright
Copyright © 1994 American Institute of Physics
ISSN
0003-6951
eISSN
0003-6951
D.O.I.
10.1063/1.111452
Publisher site
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