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A shadow mask for sputtered films

Ingle, Frank W.

Follow Review of Scientific Instruments , Volume 45 (11) American Institute of Physics – Nov 1, 1974

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Title: A shadow mask for sputtered films
Author(s): Ingle, Frank W.
Journal: Follow Review of Scientific Instruments , Volume 45 (11) American Institute of Physics – Nov 1, 1974
Publisher: American Institute of Physics
Copyright: Copyright © 1974 The American Institute of Physics
ISSN: 0034-6748
eISSN: 1089-7623
D.O.I.: 10.1063/1.1686529
Publisher site: Get PDF

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