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Journal of Micromechatronics , Vol. 1, No. 1, pp. 49– 66 (2000) Ó VSP 2000. Design of a exible conveyer microrobot with electromagnetic eld-based friction drive control for microfactory stations ANTOINE FERREIRA Laboratoire de Vision et Robotique Ecole Nationale d’Ingénieurs de Bourges 10, Boulevard Lahitolle, 18000 Bourges, France E-mail: antoine.ferreira@ensi-bourges.fr Abstract —This paper proposes and demonstrates the feasibility of a new generation of compliant piezoelectric microconveyers for microobjects based on the cooperation of arrayed direct-drive standing wave ultrasonic motors (microSWUMs). Their operating principles, which combine active frictional contact mechanisms with electromagnetic eld-based friction drive control, are analyzed. A prototype of a planar-type ultrasonic motor incorporating 48 arrayed microSWUMs, whose overall dimensions are 47 £ 29 mm 2 , has been realized through the use of a exible active metallic sheet (stator) which acts as a mobile platform. An experimental characterization has been carried out in order to identify the main physical and technological limitations speci c to millimeter scale standing wave motors. The corresponding results indicate that powerful force/speed characteristics on the millimeter scale can be expected, i.e. high output force density around 20 mN ¢ mm ¡ 2 , a carried load ratio
Journal of Micromechatronics – Brill
Published: Jan 1, 2000
Keywords: ARRAYED ACTUATORS; ULTRASONIC MICROMOTORS; STATOR; ROTOR CONTACT INTERACTIONS; PIEZOELECTRIC MICROCONVEYER
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