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Journal of Vacuum Science and Technology B: Microelectronics and Nonometer Structures Volume 22 Issue 5

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Strain relaxation and surface roughness of In x Al 1-x; As graded buffer layers grown on InP for 6.05 ; Å; applications

Noori, A. M.; Sandhu, R. S.; Hayashi, S. L.; Meserole, E. D.; Hardev, V.; Cavus, A.; Lange, M.; Monier, C.; Hsing, R.; Sawdai, D.; Wojtowicz, M.; Block, T. R.; Gutierrez-Aitken, A.; Goorsky, M. S.

Follow Journal of Vacuum Science & Technology B: Microelectronics and Nonometer Structures , Volume 22 (5) American Vacuum Society – Sep 1, 2004
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Bias-temperature stress analysis of Cu /; ultrathin Ta /; SiO 2 /; Si interconnect structure

Lim, Boon Kiat; Park, Hun Sub; Chin, Lian Kon; Woo, Sun Woong; See, Alex K. H.; Seet, Chim-Seng; Lee, Tae-Jong; Yakovlev, Nikolai L.

Follow Journal of Vacuum Science & Technology B: Microelectronics and Nonometer Structures , Volume 22 (5) American Vacuum Society – Sep 1, 2004
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Structural and chemical characterization of functional Si O x C y : H coatings for polymeric lenses

Fernández-Hidalgo, P.; Martín-Palma, R. J.; Conde, A.; Gago, R.; Simancas, J.; García-Diego, I.; Egio, A.; Martínez-Duart, J. M.

Follow Journal of Vacuum Science & Technology B: Microelectronics and Nonometer Structures , Volume 22 (5) American Vacuum Society – Sep 1, 2004
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Atomic force microscope based analysis of bound and bound+mobile phase monolayer behavior under mechanical and electrical stress

Nainaparampil, J. J.; Eapen, K. C.; Zabinski, J. S.

Follow Journal of Vacuum Science & Technology B: Microelectronics and Nonometer Structures , Volume 22 (5) American Vacuum Society – Sep 1, 2004
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Modeling SiC surface roughness using neural network and atomic force microscopy

Kim, Byungwhan; Kim, Sungmo; Lee, Byung-Teak

Follow Journal of Vacuum Science & Technology B: Microelectronics and Nonometer Structures , Volume 22 (5) American Vacuum Society – Sep 1, 2004
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Formation of p + shallow junctions using SiGe barriers

Thompson, Phillip E.; Crosby, Robert; Bennett, Joe; Felch, Susan

Follow Journal of Vacuum Science & Technology B: Microelectronics and Nonometer Structures , Volume 22 (5) American Vacuum Society – Sep 1, 2004
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Design of a heating-cooling stage for scanning tunneling microscopy and temperature programmed desorption experiments

Illingworth, A.; Zhou, J.; Ozturk, O.; Chen, D. A.

Follow Journal of Vacuum Science & Technology B: Microelectronics and Nonometer Structures , Volume 22 (5) American Vacuum Society – Sep 1, 2004
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Changes in electrical and optical properties of p- AlGaN due to proton implantation

Polyakov, A. Y.; Smirnov, N. B.; Govorkov, A. V.; Baik, K. H.; Pearton, S. J.; Zavada, J. M.

Follow Journal of Vacuum Science & Technology B: Microelectronics and Nonometer Structures , Volume 22 (5) American Vacuum Society – Sep 1, 2004
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Surface segregation of photoresist copolymers containing polyhedral oligomeric silsesquioxanes studied by x-ray photoelectron spectroscopy

Eon, D.; Cartry, G.; Fernandez, V.; Cardinaud, C.; Tegou, E.; Bellas, V.; Argitis, P.; Gogolides, E.

Follow Journal of Vacuum Science & Technology B: Microelectronics and Nonometer Structures , Volume 22 (5) American Vacuum Society – Sep 1, 2004
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Linear alignment of SiC dots on silicon substrates

Cimalla, V.; Schmidt, A. A.; Stauden, Th.; Zekentes, K.; Ambacher, O.; Pezoldt, J.

Follow Journal of Vacuum Science & Technology B: Microelectronics and Nonometer Structures , Volume 22 (5) American Vacuum Society – Sep 1, 2004

Journal of Vacuum Science and Technology B: Microelectronics and Nonometer Structures Volume 22 Issue 5

Strain relaxation and surface roughness of In x Al 1-x; As graded buffer layers grown on InP for 6.05 ; Å; applications

Noori, A. M.; Sandhu, R. S.; Hayashi, S. L.; Meserole, E. D.; Hardev, V.; Cavus, A.; Lange, M.; Monier, C.; Hsing, R.; Sawdai, D.; Wojtowicz, M.; Block, T. R.; Gutierrez-Aitken, A.; Goorsky, M. S.

Follow Journal of Vacuum Science & Technology B: Microelectronics and Nonometer Structures , Volume 22 (5) American Vacuum Society – Sep 1, 2004

Bias-temperature stress analysis of Cu /; ultrathin Ta /; SiO 2 /; Si interconnect structure

Lim, Boon Kiat; Park, Hun Sub; Chin, Lian Kon; Woo, Sun Woong; See, Alex K. H.; Seet, Chim-Seng; Lee, Tae-Jong; Yakovlev, Nikolai L.

Follow Journal of Vacuum Science & Technology B: Microelectronics and Nonometer Structures , Volume 22 (5) American Vacuum Society – Sep 1, 2004

Structural and chemical characterization of functional Si O x C y : H coatings for polymeric lenses

Fernández-Hidalgo, P.; Martín-Palma, R. J.; Conde, A.; Gago, R.; Simancas, J.; García-Diego, I.; Egio, A.; Martínez-Duart, J. M.

Follow Journal of Vacuum Science & Technology B: Microelectronics and Nonometer Structures , Volume 22 (5) American Vacuum Society – Sep 1, 2004

Atomic force microscope based analysis of bound and bound+mobile phase monolayer behavior under mechanical and electrical stress

Nainaparampil, J. J.; Eapen, K. C.; Zabinski, J. S.

Follow Journal of Vacuum Science & Technology B: Microelectronics and Nonometer Structures , Volume 22 (5) American Vacuum Society – Sep 1, 2004

Modeling SiC surface roughness using neural network and atomic force microscopy

Kim, Byungwhan; Kim, Sungmo; Lee, Byung-Teak

Follow Journal of Vacuum Science & Technology B: Microelectronics and Nonometer Structures , Volume 22 (5) American Vacuum Society – Sep 1, 2004

Formation of p + shallow junctions using SiGe barriers

Thompson, Phillip E.; Crosby, Robert; Bennett, Joe; Felch, Susan

Follow Journal of Vacuum Science & Technology B: Microelectronics and Nonometer Structures , Volume 22 (5) American Vacuum Society – Sep 1, 2004

Design of a heating-cooling stage for scanning tunneling microscopy and temperature programmed desorption experiments

Illingworth, A.; Zhou, J.; Ozturk, O.; Chen, D. A.

Follow Journal of Vacuum Science & Technology B: Microelectronics and Nonometer Structures , Volume 22 (5) American Vacuum Society – Sep 1, 2004

Changes in electrical and optical properties of p- AlGaN due to proton implantation

Polyakov, A. Y.; Smirnov, N. B.; Govorkov, A. V.; Baik, K. H.; Pearton, S. J.; Zavada, J. M.

Follow Journal of Vacuum Science & Technology B: Microelectronics and Nonometer Structures , Volume 22 (5) American Vacuum Society – Sep 1, 2004

Surface segregation of photoresist copolymers containing polyhedral oligomeric silsesquioxanes studied by x-ray photoelectron spectroscopy

Eon, D.; Cartry, G.; Fernandez, V.; Cardinaud, C.; Tegou, E.; Bellas, V.; Argitis, P.; Gogolides, E.

Follow Journal of Vacuum Science & Technology B: Microelectronics and Nonometer Structures , Volume 22 (5) American Vacuum Society – Sep 1, 2004

Linear alignment of SiC dots on silicon substrates

Cimalla, V.; Schmidt, A. A.; Stauden, Th.; Zekentes, K.; Ambacher, O.; Pezoldt, J.

Follow Journal of Vacuum Science & Technology B: Microelectronics and Nonometer Structures , Volume 22 (5) American Vacuum Society – Sep 1, 2004

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Journal of Vacuum Science and Technology B: Microelectronics and Nonometer Structures Volume 22 Issue 5

1 - 10 of 53 articles

Noori, A. M.; Sandhu, R. S.; Hayashi, S. L.; Meserole, E. D.; Hardev, V.; Cavus, A.; Lange, M.; Monier, C.; Hsing, R.; Sawdai, D.; Wojtowicz, M.; Block, T. R.; Gutierrez-Aitken, A.; Goorsky, M. S.

Follow Journal of Vacuum Science & Technology B: Microelectronics and Nonometer Structures , Volume 22 (5) American Vacuum Society – Sep 1, 2004

Lim, Boon Kiat; Park, Hun Sub; Chin, Lian Kon; Woo, Sun Woong; See, Alex K. H.; Seet, Chim-Seng; Lee, Tae-Jong; Yakovlev, Nikolai L.

Follow Journal of Vacuum Science & Technology B: Microelectronics and Nonometer Structures , Volume 22 (5) American Vacuum Society – Sep 1, 2004

Fernández-Hidalgo, P.; Martín-Palma, R. J.; Conde, A.; Gago, R.; Simancas, J.; García-Diego, I.; Egio, A.; Martínez-Duart, J. M.

Follow Journal of Vacuum Science & Technology B: Microelectronics and Nonometer Structures , Volume 22 (5) American Vacuum Society – Sep 1, 2004

Nainaparampil, J. J.; Eapen, K. C.; Zabinski, J. S.

Follow Journal of Vacuum Science & Technology B: Microelectronics and Nonometer Structures , Volume 22 (5) American Vacuum Society – Sep 1, 2004

Kim, Byungwhan; Kim, Sungmo; Lee, Byung-Teak

Follow Journal of Vacuum Science & Technology B: Microelectronics and Nonometer Structures , Volume 22 (5) American Vacuum Society – Sep 1, 2004

Thompson, Phillip E.; Crosby, Robert; Bennett, Joe; Felch, Susan

Follow Journal of Vacuum Science & Technology B: Microelectronics and Nonometer Structures , Volume 22 (5) American Vacuum Society – Sep 1, 2004

Illingworth, A.; Zhou, J.; Ozturk, O.; Chen, D. A.

Follow Journal of Vacuum Science & Technology B: Microelectronics and Nonometer Structures , Volume 22 (5) American Vacuum Society – Sep 1, 2004

Polyakov, A. Y.; Smirnov, N. B.; Govorkov, A. V.; Baik, K. H.; Pearton, S. J.; Zavada, J. M.

Follow Journal of Vacuum Science & Technology B: Microelectronics and Nonometer Structures , Volume 22 (5) American Vacuum Society – Sep 1, 2004

Eon, D.; Cartry, G.; Fernandez, V.; Cardinaud, C.; Tegou, E.; Bellas, V.; Argitis, P.; Gogolides, E.

Follow Journal of Vacuum Science & Technology B: Microelectronics and Nonometer Structures , Volume 22 (5) American Vacuum Society – Sep 1, 2004

Cimalla, V.; Schmidt, A. A.; Stauden, Th.; Zekentes, K.; Ambacher, O.; Pezoldt, J.

Follow Journal of Vacuum Science & Technology B: Microelectronics and Nonometer Structures , Volume 22 (5) American Vacuum Society – Sep 1, 2004