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Journal of Vacuum Science and Technology B: Microelectronics and Nonometer Structures Volume 19 Issue 3

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Raman study of luminescent spark processed porous GaAs

Rojas-López, M.; Gracia-Jiménez, J. M.; Vidal, M. A.; Navarro-Contreras, H.; Silva-González, R.; Gómez, E.

Follow Journal of Vacuum Science & Technology B: Microelectronics and Nonometer Structures , Volume 19 (3) American Vacuum Society – May 1, 2001
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Review of synthesis of low-work function Cu–Li alloy coatings and characterization of the field emission properties for application to field emission devices;

Auciello, O.; Tucek, J. C.; Krauss, A. R.; Gruen, D. M.; Moldovan, N.; Mancini, D. C.

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Resist hardening by fluorocarbon plasma for electron-beam and optical mix-and-match lithography

Chan, Victor W. C.; Hai, C. H.; Chan, Philip C. H.

Follow Journal of Vacuum Science & Technology B: Microelectronics and Nonometer Structures , Volume 19 (3) American Vacuum Society – May 1, 2001
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Selective ultrahigh vacuum dry etching process for ZnSe-based II–VI semiconductors;

Legge, M.; Bacher, G.; Bader, S.; Kümmell, T.; Forchel, A.; Nürnberger, J.; Schumacher, C.; Faschinger, W.; Landwehr, G.

Follow Journal of Vacuum Science & Technology B: Microelectronics and Nonometer Structures , Volume 19 (3) American Vacuum Society – May 1, 2001
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Level set approach to simulation of feature profile evolution in a high-density plasma-etching system

Im, Y. H.; Hahn, Y. B.; Pearton, S. J.

Follow Journal of Vacuum Science & Technology B: Microelectronics and Nonometer Structures , Volume 19 (3) American Vacuum Society – May 1, 2001
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Heterojunction based on polyacetylene and its photocurrent density

Pengyi, Liu; Hai, Ye

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Technique employing gold nanospheres to study defect evolution in thin films

Mirkarimi, P. B.; Baker, S. L.; Stearns, D. G.

Follow Journal of Vacuum Science & Technology B: Microelectronics and Nonometer Structures , Volume 19 (3) American Vacuum Society – May 1, 2001
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Damageless vacuum sealing of Si field emitters with CHF 3 plasma treatment

Nagao, M.; Matsukawa, T.; Kanemaru, S.; Itoh, J.; Tanabe, H.

Follow Journal of Vacuum Science & Technology B: Microelectronics and Nonometer Structures , Volume 19 (3) American Vacuum Society – May 1, 2001
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Integration of piezoelectric (Pb, La)TiO; 3 on (100)InP by using a CeO 2 buffer layer

Vasco, E.; Vázquez, L.; Zaldo, C.; Coya, C.; Kling, A.; Soares, J. C.

Follow Journal of Vacuum Science & Technology B: Microelectronics and Nonometer Structures , Volume 19 (3) American Vacuum Society – May 1, 2001
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Relationship between work function and current fluctuation of field emitters: Use of SK chart for evaluation of work function

Gotoh, Y.; Tsuji, H.; Ishikawa, J.

Follow Journal of Vacuum Science & Technology B: Microelectronics and Nonometer Structures , Volume 19 (3) American Vacuum Society – May 1, 2001

Journal of Vacuum Science and Technology B: Microelectronics and Nonometer Structures Volume 19 Issue 3

Raman study of luminescent spark processed porous GaAs

Rojas-López, M.; Gracia-Jiménez, J. M.; Vidal, M. A.; Navarro-Contreras, H.; Silva-González, R.; Gómez, E.

Follow Journal of Vacuum Science & Technology B: Microelectronics and Nonometer Structures , Volume 19 (3) American Vacuum Society – May 1, 2001

Review of synthesis of low-work function Cu–Li alloy coatings and characterization of the field emission properties for application to field emission devices;

Auciello, O.; Tucek, J. C.; Krauss, A. R.; Gruen, D. M.; Moldovan, N.; Mancini, D. C.

Follow Journal of Vacuum Science & Technology B: Microelectronics and Nonometer Structures , Volume 19 (3) American Vacuum Society – May 1, 2001

Resist hardening by fluorocarbon plasma for electron-beam and optical mix-and-match lithography

Chan, Victor W. C.; Hai, C. H.; Chan, Philip C. H.

Follow Journal of Vacuum Science & Technology B: Microelectronics and Nonometer Structures , Volume 19 (3) American Vacuum Society – May 1, 2001

Selective ultrahigh vacuum dry etching process for ZnSe-based II–VI semiconductors;

Legge, M.; Bacher, G.; Bader, S.; Kümmell, T.; Forchel, A.; Nürnberger, J.; Schumacher, C.; Faschinger, W.; Landwehr, G.

Follow Journal of Vacuum Science & Technology B: Microelectronics and Nonometer Structures , Volume 19 (3) American Vacuum Society – May 1, 2001

Level set approach to simulation of feature profile evolution in a high-density plasma-etching system

Im, Y. H.; Hahn, Y. B.; Pearton, S. J.

Follow Journal of Vacuum Science & Technology B: Microelectronics and Nonometer Structures , Volume 19 (3) American Vacuum Society – May 1, 2001

Heterojunction based on polyacetylene and its photocurrent density

Pengyi, Liu; Hai, Ye

Follow Journal of Vacuum Science & Technology B: Microelectronics and Nonometer Structures , Volume 19 (3) American Vacuum Society – May 1, 2001

Technique employing gold nanospheres to study defect evolution in thin films

Mirkarimi, P. B.; Baker, S. L.; Stearns, D. G.

Follow Journal of Vacuum Science & Technology B: Microelectronics and Nonometer Structures , Volume 19 (3) American Vacuum Society – May 1, 2001

Damageless vacuum sealing of Si field emitters with CHF 3 plasma treatment

Nagao, M.; Matsukawa, T.; Kanemaru, S.; Itoh, J.; Tanabe, H.

Follow Journal of Vacuum Science & Technology B: Microelectronics and Nonometer Structures , Volume 19 (3) American Vacuum Society – May 1, 2001

Integration of piezoelectric (Pb, La)TiO; 3 on (100)InP by using a CeO 2 buffer layer

Vasco, E.; Vázquez, L.; Zaldo, C.; Coya, C.; Kling, A.; Soares, J. C.

Follow Journal of Vacuum Science & Technology B: Microelectronics and Nonometer Structures , Volume 19 (3) American Vacuum Society – May 1, 2001

Relationship between work function and current fluctuation of field emitters: Use of SK chart for evaluation of work function

Gotoh, Y.; Tsuji, H.; Ishikawa, J.

Follow Journal of Vacuum Science & Technology B: Microelectronics and Nonometer Structures , Volume 19 (3) American Vacuum Society – May 1, 2001

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Journal of Vacuum Science and Technology B: Microelectronics and Nonometer Structures Volume 19 Issue 3

1 - 10 of 93 articles

Rojas-López, M.; Gracia-Jiménez, J. M.; Vidal, M. A.; Navarro-Contreras, H.; Silva-González, R.; Gómez, E.

Follow Journal of Vacuum Science & Technology B: Microelectronics and Nonometer Structures , Volume 19 (3) American Vacuum Society – May 1, 2001

Auciello, O.; Tucek, J. C.; Krauss, A. R.; Gruen, D. M.; Moldovan, N.; Mancini, D. C.

Follow Journal of Vacuum Science & Technology B: Microelectronics and Nonometer Structures , Volume 19 (3) American Vacuum Society – May 1, 2001

Chan, Victor W. C.; Hai, C. H.; Chan, Philip C. H.

Follow Journal of Vacuum Science & Technology B: Microelectronics and Nonometer Structures , Volume 19 (3) American Vacuum Society – May 1, 2001

Legge, M.; Bacher, G.; Bader, S.; Kümmell, T.; Forchel, A.; Nürnberger, J.; Schumacher, C.; Faschinger, W.; Landwehr, G.

Follow Journal of Vacuum Science & Technology B: Microelectronics and Nonometer Structures , Volume 19 (3) American Vacuum Society – May 1, 2001

Im, Y. H.; Hahn, Y. B.; Pearton, S. J.

Follow Journal of Vacuum Science & Technology B: Microelectronics and Nonometer Structures , Volume 19 (3) American Vacuum Society – May 1, 2001

Pengyi, Liu; Hai, Ye

Follow Journal of Vacuum Science & Technology B: Microelectronics and Nonometer Structures , Volume 19 (3) American Vacuum Society – May 1, 2001

Mirkarimi, P. B.; Baker, S. L.; Stearns, D. G.

Follow Journal of Vacuum Science & Technology B: Microelectronics and Nonometer Structures , Volume 19 (3) American Vacuum Society – May 1, 2001

Nagao, M.; Matsukawa, T.; Kanemaru, S.; Itoh, J.; Tanabe, H.

Follow Journal of Vacuum Science & Technology B: Microelectronics and Nonometer Structures , Volume 19 (3) American Vacuum Society – May 1, 2001

Vasco, E.; Vázquez, L.; Zaldo, C.; Coya, C.; Kling, A.; Soares, J. C.

Follow Journal of Vacuum Science & Technology B: Microelectronics and Nonometer Structures , Volume 19 (3) American Vacuum Society – May 1, 2001

Gotoh, Y.; Tsuji, H.; Ishikawa, J.

Follow Journal of Vacuum Science & Technology B: Microelectronics and Nonometer Structures , Volume 19 (3) American Vacuum Society – May 1, 2001