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Journal of Vacuum Science and Technology B: Microelectronics and Nonometer Structures Volume 18 Issue 5

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Theoretical and experimental investigation of ultrathin oxynitrides and the role of nitrogen at the Si –; SiO 2 interface

Demkov, A. A.; Liu, R.; Zhang, Xiaodong; Loechelt, Heather

Follow Journal of Vacuum Science & Technology B: Microelectronics and Nonometer Structures , Volume 18 (5) American Vacuum Society – Sep 1, 2000
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Development of edge field emission cold cathodes based on low work function Cu–Li alloy coatings;

Tucek, J. C.; Krauss, A. R.; Gruen, D. M.; Auciello, O.; Moldovan, N.; Mancini, D. C.; Zurn, S.; Polla, D.

Follow Journal of Vacuum Science & Technology B: Microelectronics and Nonometer Structures , Volume 18 (5) American Vacuum Society – Sep 1, 2000
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Study of aniline on a Si(111)7×7 surface by scanning tunneling microscopy;

Tomimoto, H.; Sumii, R.; Shirota, N.; Yagi, S.; Taniguchi, M.; Sekitani, T.; Tanaka, K.

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Stability of Schottky contacts with Ta–Si–N amorphous diffusion barriers and Au overlayers on 6H–SiC;

Shalish, I.; Shapira, Yoram

Follow Journal of Vacuum Science & Technology B: Microelectronics and Nonometer Structures , Volume 18 (5) American Vacuum Society – Sep 1, 2000
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Nanometer-scale Si selective epitaxial growth on Au-adsorbed Si(111) surface windows in ultrathin oxide films

Shibata, Motoshi; Nitta, Yoshiki; Fujita, Ken; Ichikawa, Masakazu

Follow Journal of Vacuum Science & Technology B: Microelectronics and Nonometer Structures , Volume 18 (5) American Vacuum Society – Sep 1, 2000
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Formation of silicon nitride gate dielectric films at 300 °C employing radical chemical vapor deposition;

Ohta, Hiroyuki; Nagashima, Atsushi; Ito, Masafumi; Hori, Masaru; Goto, Toshio

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Thermal stability in diamond-like carbon coated planar electron field emission arrays

Lin, Chin-Maw; Chang, Shoou-Jinn; Yokoyama, Meiso; Lin, I-Nan

Follow Journal of Vacuum Science & Technology B: Microelectronics and Nonometer Structures , Volume 18 (5) American Vacuum Society – Sep 1, 2000
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Use of orthogonal polynomial functions for endpoint detection during plasma etching of patterned wafers

Rietman, Edward A.; Layadi, Nace; Downey, Steve W.

Follow Journal of Vacuum Science & Technology B: Microelectronics and Nonometer Structures , Volume 18 (5) American Vacuum Society – Sep 1, 2000
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Comparison of In 0.33 Al 0.67 As/In 0.34 Ga 0.66 As on GaAs metamorphic high electron mobility transistors grown by molecular beam epitaxy with normal and inverse step on linear graded buffer layers

Cordier, Y.; Chauveau, J.-M.; Ferre, D.; Dipersio, J.

Follow Journal of Vacuum Science & Technology B: Microelectronics and Nonometer Structures , Volume 18 (5) American Vacuum Society – Sep 1, 2000
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Gas-sensing device implemented on a micromachined membrane: A combination of thick-film and very large scale integrated technologies

Vincenzi, D.; Butturi, M. A.; Guidi, V.; Carotta, M. C.; Martinelli, G.; Guarnieri, V.; Brida, S.; Margesin, B.; Giacomozzi, F.; Zen, M.; Giusti, D.; Soncini, G.; Vasiliev, A. A.; Pisliakov, A. V.

Follow Journal of Vacuum Science & Technology B: Microelectronics and Nonometer Structures , Volume 18 (5) American Vacuum Society – Sep 1, 2000

Journal of Vacuum Science and Technology B: Microelectronics and Nonometer Structures Volume 18 Issue 5

Theoretical and experimental investigation of ultrathin oxynitrides and the role of nitrogen at the Si –; SiO 2 interface

Demkov, A. A.; Liu, R.; Zhang, Xiaodong; Loechelt, Heather

Follow Journal of Vacuum Science & Technology B: Microelectronics and Nonometer Structures , Volume 18 (5) American Vacuum Society – Sep 1, 2000

Development of edge field emission cold cathodes based on low work function Cu–Li alloy coatings;

Tucek, J. C.; Krauss, A. R.; Gruen, D. M.; Auciello, O.; Moldovan, N.; Mancini, D. C.; Zurn, S.; Polla, D.

Follow Journal of Vacuum Science & Technology B: Microelectronics and Nonometer Structures , Volume 18 (5) American Vacuum Society – Sep 1, 2000

Study of aniline on a Si(111)7×7 surface by scanning tunneling microscopy;

Tomimoto, H.; Sumii, R.; Shirota, N.; Yagi, S.; Taniguchi, M.; Sekitani, T.; Tanaka, K.

Follow Journal of Vacuum Science & Technology B: Microelectronics and Nonometer Structures , Volume 18 (5) American Vacuum Society – Sep 1, 2000

Stability of Schottky contacts with Ta–Si–N amorphous diffusion barriers and Au overlayers on 6H–SiC;

Shalish, I.; Shapira, Yoram

Follow Journal of Vacuum Science & Technology B: Microelectronics and Nonometer Structures , Volume 18 (5) American Vacuum Society – Sep 1, 2000

Nanometer-scale Si selective epitaxial growth on Au-adsorbed Si(111) surface windows in ultrathin oxide films

Shibata, Motoshi; Nitta, Yoshiki; Fujita, Ken; Ichikawa, Masakazu

Follow Journal of Vacuum Science & Technology B: Microelectronics and Nonometer Structures , Volume 18 (5) American Vacuum Society – Sep 1, 2000

Formation of silicon nitride gate dielectric films at 300 °C employing radical chemical vapor deposition;

Ohta, Hiroyuki; Nagashima, Atsushi; Ito, Masafumi; Hori, Masaru; Goto, Toshio

Follow Journal of Vacuum Science & Technology B: Microelectronics and Nonometer Structures , Volume 18 (5) American Vacuum Society – Sep 1, 2000

Thermal stability in diamond-like carbon coated planar electron field emission arrays

Lin, Chin-Maw; Chang, Shoou-Jinn; Yokoyama, Meiso; Lin, I-Nan

Follow Journal of Vacuum Science & Technology B: Microelectronics and Nonometer Structures , Volume 18 (5) American Vacuum Society – Sep 1, 2000

Use of orthogonal polynomial functions for endpoint detection during plasma etching of patterned wafers

Rietman, Edward A.; Layadi, Nace; Downey, Steve W.

Follow Journal of Vacuum Science & Technology B: Microelectronics and Nonometer Structures , Volume 18 (5) American Vacuum Society – Sep 1, 2000

Comparison of In 0.33 Al 0.67 As/In 0.34 Ga 0.66 As on GaAs metamorphic high electron mobility transistors grown by molecular beam epitaxy with normal and inverse step on linear graded buffer layers

Cordier, Y.; Chauveau, J.-M.; Ferre, D.; Dipersio, J.

Follow Journal of Vacuum Science & Technology B: Microelectronics and Nonometer Structures , Volume 18 (5) American Vacuum Society – Sep 1, 2000

Gas-sensing device implemented on a micromachined membrane: A combination of thick-film and very large scale integrated technologies

Vincenzi, D.; Butturi, M. A.; Guidi, V.; Carotta, M. C.; Martinelli, G.; Guarnieri, V.; Brida, S.; Margesin, B.; Giacomozzi, F.; Zen, M.; Giusti, D.; Soncini, G.; Vasiliev, A. A.; Pisliakov, A. V.

Follow Journal of Vacuum Science & Technology B: Microelectronics and Nonometer Structures , Volume 18 (5) American Vacuum Society – Sep 1, 2000

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Journal of Vacuum Science and Technology B: Microelectronics and Nonometer Structures Volume 18 Issue 5

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Demkov, A. A.; Liu, R.; Zhang, Xiaodong; Loechelt, Heather

Follow Journal of Vacuum Science & Technology B: Microelectronics and Nonometer Structures , Volume 18 (5) American Vacuum Society – Sep 1, 2000

Tucek, J. C.; Krauss, A. R.; Gruen, D. M.; Auciello, O.; Moldovan, N.; Mancini, D. C.; Zurn, S.; Polla, D.

Follow Journal of Vacuum Science & Technology B: Microelectronics and Nonometer Structures , Volume 18 (5) American Vacuum Society – Sep 1, 2000

Tomimoto, H.; Sumii, R.; Shirota, N.; Yagi, S.; Taniguchi, M.; Sekitani, T.; Tanaka, K.

Follow Journal of Vacuum Science & Technology B: Microelectronics and Nonometer Structures , Volume 18 (5) American Vacuum Society – Sep 1, 2000

Shalish, I.; Shapira, Yoram

Follow Journal of Vacuum Science & Technology B: Microelectronics and Nonometer Structures , Volume 18 (5) American Vacuum Society – Sep 1, 2000

Shibata, Motoshi; Nitta, Yoshiki; Fujita, Ken; Ichikawa, Masakazu

Follow Journal of Vacuum Science & Technology B: Microelectronics and Nonometer Structures , Volume 18 (5) American Vacuum Society – Sep 1, 2000

Ohta, Hiroyuki; Nagashima, Atsushi; Ito, Masafumi; Hori, Masaru; Goto, Toshio

Follow Journal of Vacuum Science & Technology B: Microelectronics and Nonometer Structures , Volume 18 (5) American Vacuum Society – Sep 1, 2000

Lin, Chin-Maw; Chang, Shoou-Jinn; Yokoyama, Meiso; Lin, I-Nan

Follow Journal of Vacuum Science & Technology B: Microelectronics and Nonometer Structures , Volume 18 (5) American Vacuum Society – Sep 1, 2000

Rietman, Edward A.; Layadi, Nace; Downey, Steve W.

Follow Journal of Vacuum Science & Technology B: Microelectronics and Nonometer Structures , Volume 18 (5) American Vacuum Society – Sep 1, 2000

Cordier, Y.; Chauveau, J.-M.; Ferre, D.; Dipersio, J.

Follow Journal of Vacuum Science & Technology B: Microelectronics and Nonometer Structures , Volume 18 (5) American Vacuum Society – Sep 1, 2000

Vincenzi, D.; Butturi, M. A.; Guidi, V.; Carotta, M. C.; Martinelli, G.; Guarnieri, V.; Brida, S.; Margesin, B.; Giacomozzi, F.; Zen, M.; Giusti, D.; Soncini, G.; Vasiliev, A. A.; Pisliakov, A. V.

Follow Journal of Vacuum Science & Technology B: Microelectronics and Nonometer Structures , Volume 18 (5) American Vacuum Society – Sep 1, 2000