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Journal of Vacuum Science and Technology B: Microelectronics and Nonometer Structures Volume 17 Issue 3

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Improved size uniformity of InAs quantum dots grown on a lateral composition modulated InGaAs surface

Wohlert, D. E.; Cheng, K. Y.; Chang, K. L.; Hsieh, K. C.

Follow Journal of Vacuum Science & Technology B: Microelectronics and Nonometer Structures , Volume 17 (3) American Vacuum Society – May 1, 1999
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Growth of carbon doping Ga 0.47 In 0.53 As using CBr 4 by gas source molecular beam epitaxy for InP/InGaAs heterojunction bipolar transistor applications

Kuo, H. C.; Ahmari, D.; Moser, B. G.; Mu, J.; Hattendorf, M.; Scott, D.; Meyer, R.; Feng, M.; Stillman, G. E.

Follow Journal of Vacuum Science & Technology B: Microelectronics and Nonometer Structures , Volume 17 (3) American Vacuum Society – May 1, 1999
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Photoluminescence of as-grown and thermally annealed InGaAsN/GaAs quantum wells grown by molecular beam epitaxy

Yang, X.; Heroux, J. B.; Jurkovic, M. J.; Wang, W. I.

Follow Journal of Vacuum Science & Technology B: Microelectronics and Nonometer Structures , Volume 17 (3) American Vacuum Society – May 1, 1999
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Electrical characteristics of As-doped p -type HgCdTe epilayers grown on CdZnTe(211)B substrates by molecular beam epitaxy

Yang, B.; Aqariden, F.; Grein, C. H.; Jandaska, A.; Lee, T. S.; Nemani, A.; Rujirawat, S.; Shi, X. H.; Sumstine, M.; Velicu, S.; Sivananthan, S.

Follow Journal of Vacuum Science & Technology B: Microelectronics and Nonometer Structures , Volume 17 (3) American Vacuum Society – May 1, 1999
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Formation of W underlayer by switching bias sputtering to plug 0.25 μm contact holes;

Onuki, Jin; Nihei, Masayasu; Suwa, Masateru; Goshima, Hidekazu

Follow Journal of Vacuum Science & Technology B: Microelectronics and Nonometer Structures , Volume 17 (3) American Vacuum Society – May 1, 1999
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Ordering of In x Ga 1-x; As quantum dots self-organized on GaAs(311)B substrates

Lan, S.; Akahane, K.; Song, H. Z.; Okada, Y.; Kawabe, M.

Follow Journal of Vacuum Science & Technology B: Microelectronics and Nonometer Structures , Volume 17 (3) American Vacuum Society – May 1, 1999
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Growth and morphology of Er-doped GaN on sapphire and hydride vapor phase epitaxy substrates

Birkhahn, R.; Hudgins, R.; Lee, D.; Steckl, A. J.; Molnar, R. J.; Saleh, A.; Zavada, J. M.

Follow Journal of Vacuum Science & Technology B: Microelectronics and Nonometer Structures , Volume 17 (3) American Vacuum Society – May 1, 1999
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Temperature-composition determination based on modeling of optical constants of III-V compound semiconductors measured by spectroscopic ellipsometry

Grassi, Elena; Johnson, Shane R.; Beaudoin, Mario; Tsakalis, Kostas S.

Follow Journal of Vacuum Science & Technology B: Microelectronics and Nonometer Structures , Volume 17 (3) American Vacuum Society – May 1, 1999
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Heavily carbon-doped In 0.53 Ga 0.47 As on InP (001) substrate grown by solid source molecular beam epitaxy

Cai, W. Z.; Lubyshev, D. I.; Miller, D. L.; Streater, R. W.; SpringThorpe, A. J.

Follow Journal of Vacuum Science & Technology B: Microelectronics and Nonometer Structures , Volume 17 (3) American Vacuum Society – May 1, 1999
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Amorphous carbon films for use as both variable-transmission apertures and attenuated phase shift masks for deep ultraviolet lithography

Windt, David L.; Cirelli, Raymond A.

Follow Journal of Vacuum Science & Technology B: Microelectronics and Nonometer Structures , Volume 17 (3) American Vacuum Society – May 1, 1999

Journal of Vacuum Science and Technology B: Microelectronics and Nonometer Structures Volume 17 Issue 3

Improved size uniformity of InAs quantum dots grown on a lateral composition modulated InGaAs surface

Wohlert, D. E.; Cheng, K. Y.; Chang, K. L.; Hsieh, K. C.

Follow Journal of Vacuum Science & Technology B: Microelectronics and Nonometer Structures , Volume 17 (3) American Vacuum Society – May 1, 1999

Growth of carbon doping Ga 0.47 In 0.53 As using CBr 4 by gas source molecular beam epitaxy for InP/InGaAs heterojunction bipolar transistor applications

Kuo, H. C.; Ahmari, D.; Moser, B. G.; Mu, J.; Hattendorf, M.; Scott, D.; Meyer, R.; Feng, M.; Stillman, G. E.

Follow Journal of Vacuum Science & Technology B: Microelectronics and Nonometer Structures , Volume 17 (3) American Vacuum Society – May 1, 1999

Photoluminescence of as-grown and thermally annealed InGaAsN/GaAs quantum wells grown by molecular beam epitaxy

Yang, X.; Heroux, J. B.; Jurkovic, M. J.; Wang, W. I.

Follow Journal of Vacuum Science & Technology B: Microelectronics and Nonometer Structures , Volume 17 (3) American Vacuum Society – May 1, 1999

Electrical characteristics of As-doped p -type HgCdTe epilayers grown on CdZnTe(211)B substrates by molecular beam epitaxy

Yang, B.; Aqariden, F.; Grein, C. H.; Jandaska, A.; Lee, T. S.; Nemani, A.; Rujirawat, S.; Shi, X. H.; Sumstine, M.; Velicu, S.; Sivananthan, S.

Follow Journal of Vacuum Science & Technology B: Microelectronics and Nonometer Structures , Volume 17 (3) American Vacuum Society – May 1, 1999

Formation of W underlayer by switching bias sputtering to plug 0.25 μm contact holes;

Onuki, Jin; Nihei, Masayasu; Suwa, Masateru; Goshima, Hidekazu

Follow Journal of Vacuum Science & Technology B: Microelectronics and Nonometer Structures , Volume 17 (3) American Vacuum Society – May 1, 1999

Ordering of In x Ga 1-x; As quantum dots self-organized on GaAs(311)B substrates

Lan, S.; Akahane, K.; Song, H. Z.; Okada, Y.; Kawabe, M.

Follow Journal of Vacuum Science & Technology B: Microelectronics and Nonometer Structures , Volume 17 (3) American Vacuum Society – May 1, 1999

Growth and morphology of Er-doped GaN on sapphire and hydride vapor phase epitaxy substrates

Birkhahn, R.; Hudgins, R.; Lee, D.; Steckl, A. J.; Molnar, R. J.; Saleh, A.; Zavada, J. M.

Follow Journal of Vacuum Science & Technology B: Microelectronics and Nonometer Structures , Volume 17 (3) American Vacuum Society – May 1, 1999

Temperature-composition determination based on modeling of optical constants of III-V compound semiconductors measured by spectroscopic ellipsometry

Grassi, Elena; Johnson, Shane R.; Beaudoin, Mario; Tsakalis, Kostas S.

Follow Journal of Vacuum Science & Technology B: Microelectronics and Nonometer Structures , Volume 17 (3) American Vacuum Society – May 1, 1999

Heavily carbon-doped In 0.53 Ga 0.47 As on InP (001) substrate grown by solid source molecular beam epitaxy

Cai, W. Z.; Lubyshev, D. I.; Miller, D. L.; Streater, R. W.; SpringThorpe, A. J.

Follow Journal of Vacuum Science & Technology B: Microelectronics and Nonometer Structures , Volume 17 (3) American Vacuum Society – May 1, 1999

Amorphous carbon films for use as both variable-transmission apertures and attenuated phase shift masks for deep ultraviolet lithography

Windt, David L.; Cirelli, Raymond A.

Follow Journal of Vacuum Science & Technology B: Microelectronics and Nonometer Structures , Volume 17 (3) American Vacuum Society – May 1, 1999

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Journal of Vacuum Science and Technology B: Microelectronics and Nonometer Structures Volume 17 Issue 3

1 - 10 of 84 articles

Wohlert, D. E.; Cheng, K. Y.; Chang, K. L.; Hsieh, K. C.

Follow Journal of Vacuum Science & Technology B: Microelectronics and Nonometer Structures , Volume 17 (3) American Vacuum Society – May 1, 1999

Kuo, H. C.; Ahmari, D.; Moser, B. G.; Mu, J.; Hattendorf, M.; Scott, D.; Meyer, R.; Feng, M.; Stillman, G. E.

Follow Journal of Vacuum Science & Technology B: Microelectronics and Nonometer Structures , Volume 17 (3) American Vacuum Society – May 1, 1999

Yang, X.; Heroux, J. B.; Jurkovic, M. J.; Wang, W. I.

Follow Journal of Vacuum Science & Technology B: Microelectronics and Nonometer Structures , Volume 17 (3) American Vacuum Society – May 1, 1999

Yang, B.; Aqariden, F.; Grein, C. H.; Jandaska, A.; Lee, T. S.; Nemani, A.; Rujirawat, S.; Shi, X. H.; Sumstine, M.; Velicu, S.; Sivananthan, S.

Follow Journal of Vacuum Science & Technology B: Microelectronics and Nonometer Structures , Volume 17 (3) American Vacuum Society – May 1, 1999

Onuki, Jin; Nihei, Masayasu; Suwa, Masateru; Goshima, Hidekazu

Follow Journal of Vacuum Science & Technology B: Microelectronics and Nonometer Structures , Volume 17 (3) American Vacuum Society – May 1, 1999

Lan, S.; Akahane, K.; Song, H. Z.; Okada, Y.; Kawabe, M.

Follow Journal of Vacuum Science & Technology B: Microelectronics and Nonometer Structures , Volume 17 (3) American Vacuum Society – May 1, 1999

Birkhahn, R.; Hudgins, R.; Lee, D.; Steckl, A. J.; Molnar, R. J.; Saleh, A.; Zavada, J. M.

Follow Journal of Vacuum Science & Technology B: Microelectronics and Nonometer Structures , Volume 17 (3) American Vacuum Society – May 1, 1999

Grassi, Elena; Johnson, Shane R.; Beaudoin, Mario; Tsakalis, Kostas S.

Follow Journal of Vacuum Science & Technology B: Microelectronics and Nonometer Structures , Volume 17 (3) American Vacuum Society – May 1, 1999

Cai, W. Z.; Lubyshev, D. I.; Miller, D. L.; Streater, R. W.; SpringThorpe, A. J.

Follow Journal of Vacuum Science & Technology B: Microelectronics and Nonometer Structures , Volume 17 (3) American Vacuum Society – May 1, 1999

Windt, David L.; Cirelli, Raymond A.

Follow Journal of Vacuum Science & Technology B: Microelectronics and Nonometer Structures , Volume 17 (3) American Vacuum Society – May 1, 1999