Browse

New! Learn more about the all new DeepDyve personalized home page where you can quickly skim your favorite journals all from one place

Journal of Micro/Nanolithography, MEMS and MOEMS

2012
- Volume 11
  - Issue 2 (Apr)
  - Issue 1 (Jan)
2011
- Volume 10
2010
- Volume 9
2009
- Volume 8
2008
- Volume 7
2007
- Volume 6
2006
- Volume 5
2005
- Volume 4
2004
- Volume 3
2003
- Volume 2
2002
- Volume 1

Bookmark
More Like This bm4kQY0VCG $3.99

Source for extreme ultraviolet lithography based on plasma sustained by millimeter-wave gyrotron radiation

Chkhalo, Nikolay I.; Golubev, Sergei V.; Mansfeld, Dmitry; Salashchenko, Nikolay N.; Sjmaenok, Leonid A.; Vodopyanov, Alexander V.

Follow Journal of Micro/Nanolithography, MEMS and MOEMS , Volume 11 (2)
SPIE – Apr 1, 2012
Bookmark
More Like This RASFd9Z0BC $3.99

Packaging of MEMS and MOEMS for harsh environments

Kähler, Julian; Stranz, Andrej; Waag, Andreas; Peiner, Erwin

Follow Journal of Micro/Nanolithography, MEMS and MOEMS , Volume 11 (2)
SPIE – Apr 1, 2012
Bookmark
More Like This 9isEO6HqVF $3.99

Return-to-zero line code modeling of distributed tin targets for laser-produced plasma sources of extreme ultraviolet radiation

Koshelev, Konstantin N.; Ivanov, Vladimir V.; Novikov, Vladimir G.; Medvedev, Viacheslav; Grushin, Alexander S.; Krivtsun, Vladimir M.

Follow Journal of Micro/Nanolithography, MEMS and MOEMS , Volume 11 (2)
SPIE – Apr 1, 2012
Bookmark
More Like This UpKaiOYmr7 $3.99

Effect of added mass using resonant peak shifting technique

Burra, Rajesh Kumar; Vankara, Jyothi; Reddy, D. V. Rama Kota

Follow Journal of Micro/Nanolithography, MEMS and MOEMS , Volume 11 (2)
SPIE – Apr 1, 2012
Bookmark
More Like This gvhd0lWpEu $3.99

Frequency effects and life prediction of polysilicon microcantilever beams in bending fatigue

Hung, Jeng-Nan; Hocheng, Hong

Follow Journal of Micro/Nanolithography, MEMS and MOEMS , Volume 11 (2)
SPIE – Apr 1, 2012
Bookmark
More Like This Zby01I5ajP $3.99

Homogeneous one-dimensional optical lattice generation using a digital micromirror device-based high-precision beam shaper

Liang, Jinyang; Kohn, Rudolph N.; Becker, Michael F.; Heinzen, Daniel J.

Follow Journal of Micro/Nanolithography, MEMS and MOEMS , Volume 11 (2)
SPIE – Apr 1, 2012
Bookmark
More Like This C0Tc41doFw $3.99

Conformal coating of poly-glycidyl methacrylate as lithographic polymer via initiated chemical vapor deposition

Yoshida, Shinya; Kobayashi, Tatsuya; Kumano, Masafumi; Esashi, Masayoshi

Follow Journal of Micro/Nanolithography, MEMS and MOEMS , Volume 11 (2)
SPIE – Apr 1, 2012
Bookmark
More Like This hp0ewAMHQr $3.99

Extreme-ultraviolet light source development to enable pre-production mask inspection

Partlow, Matthew J.; Besen, Matthew M.; Blackborow, Paul A.; Collins, Ron; Gustafson, Deborah; Horne, Stephen F.; Smith, Donald K.

Follow Journal of Micro/Nanolithography, MEMS and MOEMS , Volume 11 (2)
SPIE – Apr 1, 2012
Bookmark
More Like This L3rGvNJi5h $3.99

Tin laser-produced plasma as the light source for extreme ultraviolet lithography high-volume manufacturing: history, ideal plasma, present status, and prospects

Tomie, Toshihisa

Follow Journal of Micro/Nanolithography, MEMS and MOEMS , Volume 11 (2)
SPIE – Apr 1, 2012
Bookmark
More Like This q5D3lwu3Uz $3.99

Parameter extraction of MEMS comb-drive near-resonance equivalent circuit: physically-based technique for a unique solution

Sabry, Yasser; Medhat, Mostafa; Saadany, Bassam; Bourouina, Tarik; Khalil, Diaa

Follow Journal of Micro/Nanolithography, MEMS and MOEMS , Volume 11 (2)
SPIE – Apr 1, 2012

About DeepDyve

DeepDyve provides simple and affordable access to millions of articles across thousands of peer-reviewed journals. Content from the world's leading publishers including Reed Elsevier, Springer, Wiley-Blackwell, and more. DeepDyve — the simplest way to get the articles you need.
Rent from the Cloud - starting at $0.99
With DeepDyve, you can "rent" and read an article through your browser— for as little as $0.99. What exactly is "renting"? Renting an article means you can read the full article as often as you like until it expires (7 days or longer), but it cannot be downloaded or printed. Renting allows you to save up to 90%, so you can read articles without the worry.

"Rent to Own" — Buy PDF's, Save up to 20%
With DeepDyve's monthly plans (starting at $5.99), you not only get savings on rentals, you also receive 20% discount coupons for your PDF purchases. What happens if you don't use all your rental tokens or coupons this month? No problem, they automatically roll-over so you can stockpile them for when you need them.
14-day Risk Free Trial — Commitment Free, Cancel Anytime

Still thinking it over? Then try our service for free for 14 days. You can cancel at any time within the trial, no questions asked, and your credit card will not be billed. Should you continue with our service beyond the trial, you will only be charged month-to-month, so you can still cancel at any time — there's no contract or long-term commitment.
Privacy and Security

DeepDyve values your privacy and security. We will never sell your personal information to any third party.

Sign Up for a DeepDyve Account

Bookmark an Article

To bookmark an article, please log in first, or sign up for a DeepDyve account if you don't already have one.

Subscribe to Journal Email Alerts

To subscribe to email alerts, please log in first, or sign up for a DeepDyve account if you don't already have one.

Please refresh to generate a new download link

Your article download link has expired. Please refresh this page to obtain a new download link and try again.

Follow a Journal

To get new article updates from a journal on your personalized homepage, please log in first, or sign up for a DeepDyve account if you don't already have one.

Advanced Filters:

Specific Data Sources:

Journal of Micro/Nanolithography, MEMS and MOEMS

1 - 10 of 18 articles

Chkhalo, Nikolay I.; Golubev, Sergei V.; Mansfeld, Dmitry; Salashchenko, Nikolay N.; Sjmaenok, Leonid A.; Vodopyanov, Alexander V.

Follow Journal of Micro/Nanolithography, MEMS and MOEMS , Volume 11 (2) SPIE – Apr 1, 2012

Kähler, Julian; Stranz, Andrej; Waag, Andreas; Peiner, Erwin

Follow Journal of Micro/Nanolithography, MEMS and MOEMS , Volume 11 (2) SPIE – Apr 1, 2012

Koshelev, Konstantin N.; Ivanov, Vladimir V.; Novikov, Vladimir G.; Medvedev, Viacheslav; Grushin, Alexander S.; Krivtsun, Vladimir M.

Follow Journal of Micro/Nanolithography, MEMS and MOEMS , Volume 11 (2) SPIE – Apr 1, 2012

Burra, Rajesh Kumar; Vankara, Jyothi; Reddy, D. V. Rama Kota

Follow Journal of Micro/Nanolithography, MEMS and MOEMS , Volume 11 (2) SPIE – Apr 1, 2012

Hung, Jeng-Nan; Hocheng, Hong

Follow Journal of Micro/Nanolithography, MEMS and MOEMS , Volume 11 (2) SPIE – Apr 1, 2012

Liang, Jinyang; Kohn, Rudolph N.; Becker, Michael F.; Heinzen, Daniel J.

Follow Journal of Micro/Nanolithography, MEMS and MOEMS , Volume 11 (2) SPIE – Apr 1, 2012

Yoshida, Shinya; Kobayashi, Tatsuya; Kumano, Masafumi; Esashi, Masayoshi

Follow Journal of Micro/Nanolithography, MEMS and MOEMS , Volume 11 (2) SPIE – Apr 1, 2012

Partlow, Matthew J.; Besen, Matthew M.; Blackborow, Paul A.; Collins, Ron; Gustafson, Deborah; Horne, Stephen F.; Smith, Donald K.

Follow Journal of Micro/Nanolithography, MEMS and MOEMS , Volume 11 (2) SPIE – Apr 1, 2012

Follow Journal of Micro/Nanolithography, MEMS and MOEMS , Volume 11 (2) SPIE – Apr 1, 2012

Sabry, Yasser; Medhat, Mostafa; Saadany, Bassam; Bourouina, Tarik; Khalil, Diaa

Follow Journal of Micro/Nanolithography, MEMS and MOEMS , Volume 11 (2) SPIE – Apr 1, 2012

About DeepDyve

14-day Risk Free Trial — Commitment Free, Cancel Anytime

Privacy and Security

Bookmark an Article

Subscribe to Journal Email Alerts

Please refresh to generate a new download link

Follow a Journal

Follow Journal of Micro/Nanolithography, MEMS and MOEMS , Volume 11 (2)
SPIE – Apr 1, 2012

Follow Journal of Micro/Nanolithography, MEMS and MOEMS , Volume 11 (2)
SPIE – Apr 1, 2012

Follow Journal of Micro/Nanolithography, MEMS and MOEMS , Volume 11 (2)
SPIE – Apr 1, 2012

Follow Journal of Micro/Nanolithography, MEMS and MOEMS , Volume 11 (2)
SPIE – Apr 1, 2012

Follow Journal of Micro/Nanolithography, MEMS and MOEMS , Volume 11 (2)
SPIE – Apr 1, 2012

Follow Journal of Micro/Nanolithography, MEMS and MOEMS , Volume 11 (2)
SPIE – Apr 1, 2012

Follow Journal of Micro/Nanolithography, MEMS and MOEMS , Volume 11 (2)
SPIE – Apr 1, 2012

Follow Journal of Micro/Nanolithography, MEMS and MOEMS , Volume 11 (2)
SPIE – Apr 1, 2012

Follow Journal of Micro/Nanolithography, MEMS and MOEMS , Volume 11 (2)
SPIE – Apr 1, 2012

Follow Journal of Micro/Nanolithography, MEMS and MOEMS , Volume 11 (2)
SPIE – Apr 1, 2012